Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure
Jayachandran, Suseendran, Billen, Arne, Douhard, Bastien, Conard, Thierry, Meersschaut, Johan, Moussa, Alain, Caymax, Matty, Bender, Hugo, Vandervorst, Wilfried, Heyns, Marc, Delabie, AnneliesVolume:
384
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.04.137
Date:
October, 2016
File:
PDF, 3.11 MB
english, 2016