Large-displacement actuating and high-frequency vibrating characteristics of silicon-based antiferroelectric (Pb, La)(Zr, Ti)O3 thick-film micro-cantilevers
An, Kun, Liu, Li, Zhang, Peng, He, Jian, Chou, Xiujian, Xue, Chenyang, Zhang, WendongVolume:
162
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.05.003
Date:
August, 2016
File:
PDF, 2.22 MB
english, 2016