Fabrication of Microhotplates Based on Laser Micromachining...

Physics Procedia 2015 Vol. 72

Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide

Oblov, Konstantin, Ivanova, Anastasia, Soloviev, Sergey, Samotaev, Nikolay, Lipilin, Alexandr, Vasiliev, Alexey, Sokolov, Andrey
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Volume:
72
Year:
2015
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2015.09.057
File:
PDF, 557 KB
english, 2015
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