Optical Simulation for an Optimized Wafer Level Optopackage for 2D-micromirrors
Stenchly, V., Schwarz, F., Quenzer, H.J., Benecke, W.Volume:
120
Year:
2015
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.08.842
File:
PDF, 604 KB
english, 2015