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Surface and Coatings Technology 2016 / 4

Modeling of carbon penetration into silicon structure under the action of pulsed high-intensity ion beam

Aktaev, Nurken E., Remnev, Gennady E.
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Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.04.050
Date:
April, 2016
File:
PDF, 578 KB
english, 2016
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