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Structural evolution and optical properties of hydrogenated germanium carbonitride films
Hu, Chaoquan, Tian, Yuan, Wang, Jianbo, Zhang, Sam, Cheng, Diyi, Chen, You, Zhang, Kan, Zheng, WeitaoVolume:
129
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.04.007
Date:
July, 2016
File:
PDF, 2.83 MB
english, 2016