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Novel transparent MgSiON thin films with high hardness and refractive index
Ali, Sharafat, Paul, Biplab, Magnusson, Roger, Greczynski, Grzegorz, Broitman, Esteban, Jonson, Bo, Eklund, Per, Birch, JensVolume:
131
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.05.023
Date:
September, 2016
File:
PDF, 660 KB
english, 2016