Investigation on Etch Characteristics of Nanometer-Sized Magnetic Tunnel Junction Stacks Using a HBr/Ar Plasma
Kim, Eun Ho, Xiao, Yu Bin, Kong, Seon Mi, Chung, Chee WonVolume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.4483
Date:
July, 2011
File:
PDF, 1.72 MB
english, 2011