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Effect of photocatalytic oxidation technology on GaN CMP
Wang, Jie, Wang, Tongqing, Pan, Guoshun, Lu, XinchunVolume:
361
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.11.062
Date:
January, 2016
File:
PDF, 3.19 MB
english, 2016