Microstructure and electrical properties of co-sputtered Cu...

Microstructure and electrical properties of co-sputtered Cu embedded amorphous SiC

Fan, Junqing, Jiang, Liudi, Zhong, Le, Gowers, Robert P., Morgan, Katrina A., de Groot, C.H.
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Volume:
178
Language:
english
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2016.04.144
Date:
September, 2016
File:
PDF, 1.85 MB
english, 2016
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