Thermal characterization of epitaxial grown polycrystalline...

Thin Solid Films 2016 / 05 Vol. 606

Thermal characterization of epitaxial grown polycrystalline silicon

Liebchen, Robert, Breitschädel, Oliver, Durmaz, Ali Riza, Griesinger, Andreas
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Volume:
606
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.03.030
Date:
May, 2016
File:
PDF, 1.66 MB
english, 2016
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