Amorphous SiC films prepared by low-energy cluster beam...

Philosophical Magazine A 2000 / 01 Vol. 80; Iss. 1

Amorphous SiC films prepared by low-energy cluster beam deposition

Mélinon, P., Kéghélian, P., Perez, A., Rousset, J. L., Cadrot, A. M., Malhomme, A., Renouprez, A. J., Cadete Santos Aires, F. J.
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Volume:
80
Language:
english
Journal:
Philosophical Magazine A
DOI:
10.1080/01418610008212046
Date:
January, 2000
File:
PDF, 1.75 MB
english, 2000
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