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Epitaxial growth of rutile TiO2 thin films by oxidation of TiN/Si{100} heterostructure
Moatti, A., Bayati, R., Narayan, J.Volume:
103
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2015.10.022
Date:
January, 2016
File:
PDF, 2.89 MB
english, 2016