Monolithic of SOI wafer waveguide and InP-laser with...

Microelectronic Engineering 2015 / 12 Vol. 148

Monolithic of SOI wafer waveguide and InP-laser with DVS-BCB coating and bonding

Liou, Jian-Chiun, Yang, Cheng-Fu, Lin, Yi-Chen, Chao, Chia-Hsin
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Volume:
148
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.07.010
Date:
December, 2015
File:
PDF, 1.19 MB
english, 2015
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