Dual track Wallace fly height measurement method to monitor...

Dual track Wallace fly height measurement method to monitor slider motion in 2 dimension at near contact regime

Ong, Chun Lian, Leong, Siang Huei, Ang, Shiming, Santoso, Budi, Yuan, Zhimin
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2686-1
Date:
June, 2016
File:
PDF, 1.50 MB
english, 2016
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