Surface chemistry and fundamental limitations on the plasma...

Surface chemistry and fundamental limitations on the plasma cleaning of metals

Dong, Bin, Driver, M. Sky, Emesh, Ismail, Shaviv, Roey, Kelber, Jeffry A.
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Volume:
384
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.05.082
Date:
October, 2016
File:
PDF, 1.00 MB
english, 2016
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