The Impact of N2 Anneal on Laser Processed Silicon

Energy Procedia 2015 / 08 Vol. 77

The Impact of N2 Anneal on Laser Processed Silicon

Xu, Lujia, Weber, Klaus, Yang, Xinbo, Fell, Andreas, Franklin, Evan
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Volume:
77
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2015.07.107
Date:
August, 2015
File:
PDF, 749 KB
english, 2015
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