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Profile measurement of thin films by backpropagation of multiple-wavelength optical fields with two sinusoidal phase-modulating interferometers
Sasaki, Osami, Xin, Jian, Choi, Samuel, Suzuki, TakamasaVolume:
356
Language:
english
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2015.08.066
Date:
December, 2015
File:
PDF, 994 KB
english, 2015