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Bulk FinFETs with body spacers for improving fin height variation
Wei, Xing, Zhu, Huilong, Zhang, Yanbo, Zhao, ChaoVolume:
122
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2016.04.009
Date:
August, 2016
File:
PDF, 1.93 MB
english, 2016