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Structural control of oligomeric methyl silsesquioxane precursors and their thin-film properties
Long-Hua Lee, Wen-Chang Chen, Wei-Chih LiuVolume:
40
Year:
2002
Language:
english
Pages:
12
DOI:
10.1002/pola.10246
File:
PDF, 237 KB
english, 2002