Structural control of oligomeric methyl silsesquioxane...

Structural control of oligomeric methyl silsesquioxane precursors and their thin-film properties

Long-Hua Lee, Wen-Chang Chen, Wei-Chih Liu
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Volume:
40
Year:
2002
Language:
english
Pages:
12
DOI:
10.1002/pola.10246
File:
PDF, 237 KB
english, 2002
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