Negative-working photoresist of methacrylate polymers based on the transesterification of the 2-hydroxyethyl group in the presence of an acid
Jongsoo Lee, Toshiaki Aoai, Syun'ichi Kondo, Nobukazu Miyagawa, Shigeru Takahara, Tsuguo YamaokaVolume:
40
Year:
2002
Language:
english
Pages:
10
DOI:
10.1002/pola.10252
File:
PDF, 262 KB
english, 2002