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Resonant Frequency Tuning of Piezoelectric Ultrasonic Microsensors by Bias Voltage Application to Extra Top-Electrodes on PZT Diaphragms
Yamashita, Kaoru, Tomiyama, Kenji, Yoshikawa, Keita, Noda, Minoru, Okuyama, MasanoriVolume:
408
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150193.2010.485014
Date:
November, 2010
File:
PDF, 719 KB
english, 2010