Etching effects to PZT capacitors with RuO x...

Integrated Ferroelectrics 1997 / 04 Vol. 16; Iss. 1-4

Etching effects to PZT capacitors with RuO x /Pt electrode by using inductively coupled plasma

Kim, Chang Jung, Lee, J. Key, Chung, C. Won, Chung, I.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589708013036
Date:
April, 1997
File:
PDF, 865 KB
english, 1997
Conversion to is in progress
Conversion to is failed