Polymerization of para-xylylene derivatives (parylene...

Journal of Polymer Science Part A: Polymer Chemistry 1986 Vol. 24; Iss. 2

Polymerization of para-xylylene derivatives (parylene polymerization). III. Heat effects during deposition of parylene N at different temperatures

M. Gazicki, G. Surendran, W. James, H. Yasuda
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Volume:
24
Year:
1986
Language:
english
Pages:
26
DOI:
10.1002/pola.1986.080240203
File:
PDF, 1.56 MB
english, 1986
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