Synthesis of nearly monodisperse poly(α-methylstyrene)s containing two Si atoms and an allyl group and the application to resist
Kazuhide Saigo, Fumitake WatanabeVolume:
27
Year:
1989
Language:
english
Pages:
14
DOI:
10.1002/pola.1989.080270810
File:
PDF, 1.20 MB
english, 1989