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The effect of power on the plasma-assisted deposition of fluorinated monomers
R. d'Agostino, P. Favia, F. Fracassi, F. IlluzziVolume:
28
Year:
1990
Language:
english
Pages:
16
DOI:
10.1002/pola.1990.080281217
File:
PDF, 698 KB
english, 1990