Direct observation of the lattice sites of implanted...

Applied Physics A: Materials Science & Processing 2016 / 3 Vol. 122; Iss. 3

Direct observation of the lattice sites of implanted manganese in silicon

da Silva, Daniel José, Wahl, Ulrich, Correia, João Guilherme, Amorim, Lígia Marina, Decoster, Stefan, da Silva, Manuel Ribeiro, Pereira, Lino Miguel da Costa, Araújo, João Pedro
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Volume:
122
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-016-9724-4
Date:
March, 2016
File:
PDF, 1.27 MB
english, 2016
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