Mechanism design with rotational and positioning...

Microsystem Technologies 2016 / 10 Vol. 22; Iss. 10

Mechanism design with rotational and positioning calibrations for double-sided structure replication

Wu, Cheng-Hsien, Chiu, Cheng-Hao
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2592-6
Date:
October, 2016
File:
PDF, 2.16 MB
english, 2016
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