In-liquid characterization of in-plane and high order...

Microsystem Technologies 2016 / 7 Vol. 22; Iss. 7

In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplates

Ruiz-Díez, V., Hernando-García, J., Ababneh, A., Seidel, H., Sánchez-Rojas, J. L.
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Volume:
22
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2800-4
Date:
July, 2016
File:
PDF, 1.21 MB
english, 2016
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