Highly uniform residual layers for arrays of 3D...

Applied Nanoscience 2016 / 4 Vol. 6; Iss. 4

Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers

Memon, Imran, Shen, Yannan, Khan, Abdullah, Woidt, Carsten, Hillmer, Hartmut
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Volume:
6
Language:
english
Journal:
Applied Nanoscience
DOI:
10.1007/s13204-015-0468-9
Date:
April, 2016
File:
PDF, 1.88 MB
english, 2016
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