International Journal of Precision Engineering and Manufacturing-Green Technology
2016 / 4 Vol. 3; Iss. 2
Effect of glycine on copper CMP
Jang, Soocheon, Jeong, Haedo, Yuh, Minjong, Park, Inho, Park, JaehongVolume:
3
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing-Green Technology
DOI:
10.1007/s40684-016-0019-1
Date:
April, 2016
File:
PDF, 473 KB
english, 2016