Modulation of the Schottky Barrier Height for CMOS advanced contacts
Menghini, Mariela A., Homm, Pia, Su, Chen-Yi, Kittl, Jorge A., Tomita, Ryuji, Hegde, Ganesh, Lee, Joon-Gon, Hyun, Sangjin, Bowen, Chris, Rodder, Mark.S., Afanas'ev, Valeri, Locquet, Jean-PierreVolume:
156
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.01.003
Date:
April, 2016
File:
PDF, 587 KB
english, 2016