Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2016 / 08 Vol. 828
Processing of n+/p−/p+ strip detectors with atomic layer deposition (ALD) grown Al2O3 field insulator on magnetic Czochralski silicon (MCz-si) substrates
Härkönen, J., Tuovinen, E., Luukka, P., Gädda, A., Mäenpää, T., Tuominen, E., Arsenovich, T., Junkes, A., Wu, X., Li, Z.Volume:
828
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2016.04.069
Date:
August, 2016
File:
PDF, 1.63 MB
english, 2016