Nanosecond Pulsed Laser Processing of Ion Implanted Single Crystal Silicon Carbide Thin Layers
Özel, Tuğrul, Thepsonthi, Thanongsak, Amarasinghe, Voshadhi P., Celler, George K.Volume:
56
Year:
2014
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2014.08.113
File:
PDF, 1.31 MB
english, 2014