A Study of Roughness Improvement of Al2O3 Substrates Using...

Procedia Engineering 2016 Vol. 141

A Study of Roughness Improvement of Al2O3 Substrates Using Sol-Gel Method

Liu, Tung-Yueh, Teoh, Lay-Gaik, Huang, Chao-Kai, Lee, Ying-Chieh
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Volume:
141
Year:
2016
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2015.09.224
File:
PDF, 827 KB
english, 2016
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