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Superhydrophobic Si surfaces having microscale rod structures prepared in a plasma etching system
Cho, Sung-Woon, Kim, Jun-Hyun, Lee, Hae-Min, Chae, Heeyeop, Kim, Chang-KooLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2016.05.009
Date:
May, 2016
File:
PDF, 1.11 MB
english, 2016