Sub-10 nm Thick Microporous Membranes Made by Plasma-Defined Atomic Layer Deposition of a Bridged Silsesquioxane Precursor
Jiang, Ying-Bing, Xomeritakis, George, Chen, Zhu, Dunphy, Darren, Kissel, David J., Cecchi, Joseph L., Brinker, C. JeffreyVolume:
129
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja0773756
Date:
December, 2007
File:
PDF, 371 KB
english, 2007