Formation of long-range stripe patterns with sub-10-nm half-pitch from directed self-assembly of block copolymer
Mikihito Takenaka, Shusuke Aburaya, Satoshi Akasaka, Hirokazu Hasegawa, Nikos Hadjichristidis, George Sakellariou, Yasuhiko Tada, Hiroshi YoshidaVolume:
48
Year:
2010
Language:
english
Pages:
5
DOI:
10.1002/polb.22115
File:
PDF, 476 KB
english, 2010