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[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Challenges and solutions in 2X nand contact structure
Chang, Rong-Yao, Zhang, Yi-Ying, Zhang, Hai-YangYear:
2016
Language:
english
DOI:
10.1109/cstic.2016.7463994
File:
PDF, 442 KB
english, 2016