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[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Study of surface control during barrier layer etch
Luo, Weijun, Ma, Bao Shang, Shen, Fei, Hao, Zhijie, Huang, JunWen, Pei, Huiyuan, Xia, Jiang Jun, Meng, Fan Shun, Jie, Li, Ren, LianjuanYear:
2016
Language:
english
DOI:
10.1109/cstic.2016.7464003
File:
PDF, 1.06 MB
english, 2016