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[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - Investigation of embedded silicon germanium typical defect solution for advanced CMOS process
Tu, Huojin, He, Yonggen, He, Youfeng, Liu, Jialei, Jin, Lan, Cai, Guohui, Liu, Yu, Huang, YujianYear:
2016
Language:
english
DOI:
10.1109/cstic.2016.7464015
File:
PDF, 457 KB
english, 2016