![](/img/cover-not-exists.png)
[IEEE 2016 International Conference on Microelectronic Test Structures (ICMTS) - Yokohama, Japan (2016.3.28-2016.3.31)] 2016 International Conference on Microelectronic Test Structures (ICMTS) - A test structure for analysis of metal wire effect on temperature distribution in stacked IC
Matsuda, Toshihiro, Demachi, Haruka, Iwata, Hideyuki, Hatakeyama, Tomoyuki, Ohzone, TakashiYear:
2016
Language:
english
DOI:
10.1109/icmts.2016.7476167
File:
PDF, 12.84 MB
english, 2016