Investigation of Gas Phase Species and Deposition of SiO2 Films from HMDSO/O2 Plasmas
Dattatray S. Wavhal, Jianming Zhang, Michelle L. Steen, Ellen R. FisherVolume:
3
Year:
2006
Language:
english
Pages:
12
DOI:
10.1002/ppap.200500140
File:
PDF, 238 KB
english, 2006