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Plasma Polymerization Behavior of Fluorocarbon Monomers in Low-Pressure AF and RF Discharges
Mary A. Gilliam, Qingsong Yu, Hirotsugu YasudaVolume:
4
Year:
2007
Language:
english
Pages:
8
DOI:
10.1002/ppap.200600076
File:
PDF, 192 KB
english, 2007