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Synthesis of Metal Oxide Thin Films by Reactive Magnetron Sputtering in Ar/O2 Mixtures: An Experimental Study of the Chemical Mechanisms
Rony Snyders, Jean-Pierre Dauchot, Michel HecqVolume:
4
Year:
2007
Language:
english
Pages:
14
DOI:
10.1002/ppap.200600103
File:
PDF, 371 KB
english, 2007