![](/img/cover-not-exists.png)
Preliminary Synthesis of Carbon Nitride Thin Films by N2/CH4 Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films
Paul Kouakou, Valérie Brien, Badreddine Assouar, Virginie Hody, Mohammed Belmahi, Henri N. Migeon, Jamal BougdiraVolume:
4
Year:
2007
Language:
english
Pages:
1
DOI:
10.1002/ppap.200730703
File:
PDF, 261 KB
english, 2007