Determination of Plasma Parameters during Deposition of ZnO...

Plasma Processes and Polymers 2007 Vol. 4; Iss. Supplement

Determination of Plasma Parameters during Deposition of ZnO Films by Ceramic and Metallic Targets and Correlation with Film Properties

Ruben Wiese, Holger Kersten, Mario Hannemann, Volker Sittinger, Florian Ruske, Richard Menner
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Volume:
4
Year:
2007
Language:
english
Pages:
1
DOI:
10.1002/ppap.200731302
File:
PDF, 252 KB
english, 2007
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