Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O...

Plasma Processes and Polymers 2007 Vol. 4; Iss. Supplement

Oxidation of Sputtered Cu, Zr, ZrCu, ZrO2, and Zr-Cu-O Films during Thermal Annealing in Flowing Air

Jindřich Musil, Petr Zeman, Michal Jirout, Martin Šašek, Radomír Čerstvý
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Volume:
4
Year:
2007
Language:
english
Pages:
1
DOI:
10.1002/ppap.200731401
File:
PDF, 220 KB
english, 2007
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