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Pressure Dependence of Plasma Polymerization of Methane at Constant W/FM
Loic Ledernez, Hirotsugu Yasuda, Fethi Olcaytug, Felizitas Gemetz, Gerald UrbanVolume:
4
Year:
2007
Language:
english
Pages:
1
DOI:
10.1002/ppap.200731907
File:
PDF, 104 KB
english, 2007