![](/img/cover-not-exists.png)
A Comparison of Plasma in Laser and Hybrid Laser-Magnetron SiC Deposition Systems
Michal Novotný, Jiří Bulíř, Ján Lančok, Miroslav JelínekVolume:
4
Year:
2007
Language:
english
Pages:
1
DOI:
10.1002/ppap.200732320
File:
PDF, 377 KB
english, 2007